Effect of the Temperature and Humidity on the Dielectric Properties of TiO¬2 Thin Films Prepared by Spray Pyrolysis Technique

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Author(s) HD Chandrashekara | Dinesh Kumar | LCS Murthy
Pages 377-381
Volume 2
Issue 5
Date May, 2013
Keywords Spray Pyrolysis; TiO2, Titanium (IV) Isopropoxide, Dielectric constant, loss tangent.

The effect of the temperature and humidity on the dielectric properties such as dielectric constant and dissipation factor of the anatase phase structure of the TiO2 film has been studied. The film has been deposited at a temperature of 3500C using Spray Pyrolysis Technique. The structure of the deposited film has been characterized using XRD & Raman Spectroscopy. The surface morphology has been studied using SEM & EDAX. For the study of the dielectric constant and dissipation factor TiO2 thin film has been deposited on the ITO coated glass plate.

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